High-selectivity single-chip spectrometer for operation at visible wavelengths

• Autor(es): Correia, J. H. ; Bartek, M. ; Wolffenbuttel, R. F.
• Data: 1998
• Identificador Persistente: http://hdl.handle.net/1822/4742
• Origem: RepositóriUM - Universidade do Minho
• Assunto(s): Optical filters; Visible range
• Tipo de Documento: Documento de conferência
• Idioma: Inglês

Descrição

A micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM < 2 nm and finesse of 40 for narrowband operation is demonstrated.