Mechanical characterisation of TiN/ZrN multi-layered coatings

• Author(s): Tavares, C. J. ; Rebouta, L. ; Andritschky, M. ; Ramos, S.
• Date: 1999
• Persistent ID: http://hdl.handle.net/10316/4316
• Origin: Estudo Geral - Universidade de Coimbra
• Subject(s): Multi-layers; Ultra-microhardness; Adhesion; Residual stress; Roughness
• Document Type: Article
• Language: English

Description

Ultra-microhardness, adhesion and residual-stress analysis tests were performed on reactive sputtered deposited TiN/ZrN multi-layers. Hardness values as high as ~3600 Vickers were achieved for this material. Scratch tests of coatings deposited on steel substrates confirmed the existence of different mechanisms associated with total adhesion failure, depending essentially on multi-layer deposition control parameters. Stress-relaxation measurements indicated the compressive nature of these thin films. The inherent mechanical characterisation was broadened regarding the induced contributions from film thickness, total interfacial roughness, number of bi-layers and corresponding modulation periodicity. Complementary analyses with data extracted from structural XRD studies have been undertaken. http://www.sciencedirect.com/science/article/B6TGJ-41M9FXX-14/1/f67cd4e602801eb3439973eebbef7433